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BEOL-Compatible High-Performance a-IGZO Transistors with Record high Ids,max = 1207 μA/μm and on-off ratio exceeding 10^11 at Vds = 1V

Author:Qijun Li, Chengru Gu, Shenwu Zhu, Qianlan Hu,Wenjie Zhao, Xuefei Li, Ru Huang and Yanqing Wu Publish:2022/11/27
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